The device is developed by the company and Zhejiang University.
Vacuum coefficient: rotary-vine vacuum pump, single phase 220V, pumping speed 4L/s, ultimate vacuum:6×10^-1Pa.
☆Working air pressure: 10~200Pa;
☆Working voltage: 0~1500V adjustable
☆Working current: 0~200mA
☆Diameter of sputter coating bell: 140mm, height: 150mm;
☆Adjustable base station, adjustable range: 10~50mm.